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Volumn 120, Issue 1-2, 1997, Pages 159-164

XPS studies on suicide formation in ion beam irradiated Au/Si system

Author keywords

Gold suicide; Ion beam mixing; Radiation enhanced diffusion; X ray photoelectron spectroscopy

Indexed keywords

DIFFUSION; GOLD; GROWTH (MATERIALS); ION BEAMS; IRRADIATION; METALLIC FILMS; SILICON; THIN FILMS; VAPOR DEPOSITION;

EID: 0031276990     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00235-3     Document Type: Article
Times cited : (38)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.