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Volumn 120, Issue 1-2, 1997, Pages 159-164
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XPS studies on suicide formation in ion beam irradiated Au/Si system
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Author keywords
Gold suicide; Ion beam mixing; Radiation enhanced diffusion; X ray photoelectron spectroscopy
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Indexed keywords
DIFFUSION;
GOLD;
GROWTH (MATERIALS);
ION BEAMS;
IRRADIATION;
METALLIC FILMS;
SILICON;
THIN FILMS;
VAPOR DEPOSITION;
GOLD SILICIDE;
ION BEAM IRRADIATION;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 0031276990
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(97)00235-3 Document Type: Article |
Times cited : (38)
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References (20)
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