Crystal structures of the TiO2 films on the quartz substrate and the power formed in the gaseous phase by ArF laser photolysis of Ti(O-i-C3H7)4

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 1, 2000, Pages 120-123

  Watanabe, Akio ^a   Tsuchiya, Tetsuo ^a   Imai, Yoji ^a  

^a NATL INST OF MAT AND CHEM RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; DECOMPOSITION; FILMS; GAS LASERS; GASES; PHOTOLYSIS; POWDERS; SUBSTRATES; X RAY CRYSTALLOGRAPHY;

ANATASE; TITANIUM TETRAISOPROPOXIDE;

TITANIUM DIOXIDE;

EID: 0033875606     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.39.120     Document Type: Article

References (11)

1. N. Tanaka, S. Ohshio and H. Saitoh: J. Ceram. Soc. Jpn. 105 (1997) 551.
2. N. Martin, C. Rousselot, C. Savall and F. Palmino: Thin Solid Films 287 (1996) 154.
3. C. Garapon, C. Champeaux, J. Mugnier, G. Panczer, P. Marchet, A. Catherinot and B. Jacquier: Appl. Surf. Sci. 96-98 (1996) 836.
4. A. Watanabe and Y. Imai: Thin Solid Films 348 (1999) 63.
5. T. Tsuchiya, A. Watanabe, Y. Imai, H. Niino, I. Yamaguchi, T. Manabe, T. Kumagai and S. Mizuta: Jpn. J. Appl. Phys. 38 (1999) L823.
6. J. M. Criado, C. Real and J. Solia: Solid State Ion. 32/33 (1989) 461.
7. R. D. Shannon and J. A. Pask: J. Am. Ceram. Soc. 48 (1965) 392.
8. A. Watanabe, M. Mukaida, Y. Imai, K. Osato, T. Kameyama and K. Fukuda: J. Mater. Sci. 28 (1993) 5363.
9. S. Hishida, M. Takata and H. Yanagida: Yogyo Kyokai-shi 86 (1978) 631 [in Japanese].
10. A. Watanabe, Y. Imai, K. Osato, K. Sugawara, Y. Koga, H. Takeo, T. Kameyama and K. Fukuda: Denki Kagaku 57 (1989) 1067 [in Japanese].
11. K. Sugawara, T. Nakanaga, Y. Koga, H. Takeo, Y. Imai, A. Watanabe, K. Osato, T. Kameyama and K. Fukuda: Chem. Phys. Lett. 182 (1991) 466.