Microfabricated fluxgate sensors with low noise and wide bandwidth

Electronics Letters

Volumn 36, Issue 4, 2000, Pages 331-332

  Robertson, P A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; AMORPHOUS FILMS; COBALT ALLOYS; COPPER; GLASS; MAGNETIC FLUX; MAGNETIC THIN FILMS; MAGNETRON SPUTTERING; MICROSENSORS; SOLENOIDS; SPURIOUS SIGNAL NOISE; SPUTTER DEPOSITION;

FLUXGATE SENSORS;

MAGNETIC DEVICES;

EID: 0033874951     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20000308     Document Type: Article

References (6)

1. PRIMDAHL, F.: 'The fluxgate magnetometer', Rev. Sci. Instrum., 1979, 12, pp. 241-253
2. SEITZ, T.: 'Fluxgate sensor in planar microtechnology', Sens. Actuators, 1990, A21-A23, pp. 799-802
3. KAWAHITO, S., SATOH, H., SUTOH, M., and TADOKORO, Y.: 'High-resolution micro-fluxgate sensing elements using closely coupled coil structures', Sens. Actuators A, 1996, 54, pp. 612-617
4. CHIESI, L., KEJIK, P., JANOSSY, B., and POPOVIC, R.: 'CMOS planar 2D microfluxgate sensor'. Transducers '99, Sendai, Japan, June 1999, pp. 160-163
5. GOTTFRIED-GOTTFRIED, R., BUDDE, W., JAHNE, R., KUCK, H., SAUER, B., ULBRICHT, S., and WENDE, U.: 'A miniaturised magnetic field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry', Sens. Actuators A, 1997, 54, pp. 443-447
6. ROBERTSON, P.: 'Miniature magnetic sensor with a high sensitivity and wide bandwidth', Electron. Lett., 1997, 33, (5), pp. 396-397