Realisation of membranes for atomic beam collimator by macropore micromachining technique (MMT)

Materials Science and Engineering: B

Volumn 69-70, Issue , 2000, Pages 66-69

  Rossi, Andrea M ^a   Amato, G ^a   Boarino, L ^a   Novero, C ^a  

^a ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; DISSOLUTION; ELECTROCHEMISTRY; ETCHING; MICROMACHINING; MOLECULAR SPECTROSCOPY; OPTICAL COLLIMATORS; POROUS SILICON;

ATOMIC BEAM COLLIMATORS; ELECTROCHEMICAL ETCHING; MACROPORE MICROMACHINING METHOD;

SILICON WAFERS;

EID: 0033873572     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00268-8     Document Type: Article

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