Development of a modular, large-scale, high-throughput semicontinuous-mode liquid-phase epitaxy system

Journal of Crystal Growth

Volumn 211, Issue 1, 2000, Pages 411-415

  Mauk, M G ^a   Shellenbarger, Z A ^a   Sims, P E ^a   Bloothoofd, W ^a   McNeely, J B ^a   Collins, S R ^a   Rabinowitz, P I ^a   Hall, R B ^a   Dinetta, L C ^a   Barnett, A M ^a  

^a GE ENERGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DETECTORS; LIGHT EMITTING DIODES; MULTILAYERS; PHOTOVOLTAIC CELLS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR GROWTH; SOLAR CELLS;

DEPOSITION RATES; SEMICONTINUOUS MODE LIQUID PHASE EPITAXY SYSTEM;

LIQUID PHASE EPITAXY;

EID: 0033872868     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(99)00805-2     Document Type: Article

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