Process modeling of the industrial VGF growth process using the software package Crys VUN + +

Journal of Crystal Growth

Volumn 211, Issue 1, 2000, Pages 202-206

  Backofen, R ^a   Kurz, M ^a   Muller G ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; OPTIMIZATION; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MODELS; TEMPERATURE;

SOFTWARE PACKAGE CRYS VUN; VERTICAL GRADIENT FREEZE;

CRYSTAL GROWTH;

EID: 0033872273     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(99)00792-7     Document Type: Article

References (6)

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3. Kurz M., Pusztai A., Müller G. J. Crystal Growth. 198/199:1999;101.
4. M. Kurz, Doctoral Thesis at the Technical Faculty of the University Erlangen-Nürnberg, filing date 13th July 1998.
5. Kurz M., Müller G. J. Crystal Growth. 208:2000;341.
6. Neittaanmäki P., Tiba D. Optimal Control of Nonlinear Parabolic Systems. 1994;Marcel Dekker Inc. New York. (Chapter III).