Diffusion of hydrogen implanted in α-quartz during air annealing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161, Issue , 2000, Pages 641-645

  Boise, W ^a,b   Gustafsson, M ^c   Harbsmeier, F ^b   Roccaforte, F ^b  

^a UNIVERSITY OF STUTTGART   (Germany)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

^c UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL ANALYSIS; CHEMICAL REACTIONS; DIFFUSION IN SOLIDS; ION BEAMS; ION IMPLANTATION; POSITIVE IONS; QUARTZ; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

AIR ANNEALING; RESONANT NUCLEAR REACTION ANALYSIS;

HYDROGEN;

EID: 0033872008     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00681-3     Document Type: Article

References (10)

1. F. Roccaforte, W. Boise, K.P. Lieb, Appl. Phys. Lett. 73 (1998) 1349.
2. F. Roccaforte, W. Boise, K.P. Lieb, Nucl. Instr. and Meth. B 148 (1999) 692.
3. F. Roccaforte, M. Gustafsson, W. Boise, J. Keinonen, K.P. Lieb, Nucl. Instr. and Meth. B 166-167 (2000), in press.
4. M. Gustafsson, F. Roccaforte, J. Keinonen, W. Boise, L. Ziegeler, K.P. Lieb, Phys. Rev. B, in press.
5. W.K. Chu, J.W. Mayer, M.-A. Nicolet, Backscattering Spectrometry, Academic Press, Orlando, USA, 1978.
6. M. Uhrmacher et al., Nucl. Instr. and Meth. B 9 (1985) 234.
7. T. Osipowicz, K.P. Lieb, S. Brüssermann, Nucl. Instr. and Meth. B 18 (1987) 232.
8. P. Torri, J. Keinonen, K. Nordlund, Nucl. Instr. and Meth. B 84 (1994) 105.
9. J.F. Ziegler, J.P. Biersack, W. Littmark, The Stopping and Ranges of Ions in Solids, Vol. 1, Pergamon Press, New York, USA, 1985.
10. L.W. Hobbs, Nucl. Instr. and Meth. B 91 (1994) 30.