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Volumn 214, Issue 7, 2000, Pages 975-980
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Stylus damage prevention index
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Author keywords
Stylus instruments; Surface damage; Surface metrology
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Indexed keywords
PARAMETER ESTIMATION;
RANDOM PROCESSES;
STYLUS DAMAGE PREVENTION;
SURFACE MEASUREMENT;
DAMAGE;
MEASUREMENT METHOD;
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EID: 0033828687
PISSN: 09544062
EISSN: None
Source Type: Journal
DOI: 10.1243/0954406001523191 Document Type: Article |
Times cited : (7)
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References (8)
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