Metallic microstructures by electroplating on polymers: An alternative to LIGA technique

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 74, Issue 1, 2000, Pages 299-303

  Grigore, Luminita ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ELECTROLESS PLATING; ELECTROPLATING; NUCLEATION; POLYMETHYL METHACRYLATES;

NICKEL ELECTROPLATING;

NICKEL PLATING;

EID: 0033748439     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00580-2     Document Type: Article

References (14)

1. Manner A., Harsh S., Refold W. Plating Surf. Finish. 10:1988;60-65.
2. Sander D., Hoffmann S., Relling V., Muller J. J. Microelectromech. Systems. 4:1995;81-86.
3. A. Demoulin, K. Baert, MIME'93 Micro Mechanics Europe 1993, Workshop Digest 89-92, 1993.
4. Dennis J.K., Such T.E. Nickel and Chromium Plating. 1986;Butterworths, London.
5. Lowenheim F.A. Modern Electroplating. 3rd ed. 1974;Wiley, New York.
6. N. Moldovan, S. Nedelcu, J. Mohr, C. Ossmann, M. Ilie, Micromat' 97, Berlin, 14-15 April, 1997, pp. 152-156.
7. B. Gerlach, M. Ilie, J. Mohr, A. Muller, P. Ruther, Lenses Array Conference, Teddington, 14-15 May, 1997.
8. C. Ossmann, J. Gottert, M. Ilie, J. Mohr, N. Moldovan, A. Muller, P. Ruther, HARMST'97, Madison, 20-22 June, 1997.
9. Ruther P., Gerlach B., Ilie M., Mohr J., Ossmann C. Pure Appl. Opt. J. Eur. Opt. Soc. A6(6):1997;643-653.
10. L. Grigore, Proceedings of the 9th CIMTEC - World Ceramics Congress and Forum on New Materials, 1998 (in press).
11. L. Grigore, Proceedings of the International Vacuum Congress 14, 1998 (in press).
12. L. Grigore, Technology of obtaining metallic microstructures by electroforming on polymers, Registered Romanian Patent Request No. 362/1999.
13. L. Grigore, MME'99, Micromechanics Europe, Gif-sur-Yvette, France, 27-29 September 1999 (poster).
14. L. Grigore, MRS Fall Meeting, Boston, MA, December 1999 (abstract).