Modified preston equation- revisited

Materials Research Society Symposium - Proceedings

Volumn 566, Issue , 1999, Pages 149-154

  Ramarajan, S ^a   Babu, S V ^a  

^a CLARKSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; AMMONIUM COMPOUNDS; CHEMICAL POLISHING; CHEMICAL REACTIONS; HYDROGEN PEROXIDE; NITRATES; NUMERICAL METHODS; PRESSURE EFFECTS; VELOCITY; WATER;

FERRIC NITRATE; GLYCINE; POLISH RATES; PRESTON EQUATION; VELOCITY DEPENDENCE;

COPPER;

EID: 0033746194     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-566-149     Document Type: Article

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5. th international CMP-MIC, p13-22, Santa Clara, CA, Feb. 1999.
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