Single-chip 3-D silicon Hall sensor

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 167-173

  Schott, Ch ^a   Waser, J M ^a   Popovic, R S ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; HALL EFFECT DEVICES; MAGNETIC FIELD MEASUREMENT; MAGNETIC FLUX; SEMICONDUCTING SILICON;

HALL SENSORS; TRIAXIAL SENSORS;

SENSORS;

EID: 0033740824     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00331-3     Document Type: Article

References (8)

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2. Misra D., Zhang M., Cheng Z. A novel 3-D magnetic-field sensor in standard CMOS technology. Sens. Actuators, A (Physical) A. 34(1):1992;67-75.
3. Schott Ch., Manic D., Popovic R.S. Microsystem for high accuracy 3D magnetic field measurement. Sens. Actuators, A (Physical) A. 67(1-3):1998;133-137.
4. Paranjape M., Filanovsky I., Ristic L.j. A 3-D vertical Hall magnetic-field sensor in CMOS technology. Sens. Actuators, A (Physical) A. 34(1):1992;9-14.
5. Burger F., Besse P.-A., Popovic R.S. New fully integrated 3-D silicon Hall sensor for precise angular-position measurements. Sens. Actuators, A (Physical) A. 67(1-3):1998;72-76.
6. Ch. Schott, Magnetfeldsensor, Swiss patent application No. 1998 0760-98.
7. R.S. Popovic, Hall Effect Devices, Adam Hilger, Bristol, 1991.
8. Z. Randjelovic, Y. Haddab, A. Pauchard, R.S. Popovic, A novel non-plate like sensor, Proc. of EUROSENSORS XII, Southampton, UK, 13-16 September, 1998.