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Volumn 83, Issue 1, 2000, Pages 167-171

Highly sensitive thermistors based on high-purity polycrystalline cubic silicon carbide

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC RESISTANCE; MATHEMATICAL MODELS; NEGATIVE TEMPERATURE COEFFICIENT; POLYCRYSTALLINE MATERIALS; SENSORS; SILICON CARBIDE; SILICON WAFERS;

EID: 0033740634     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00351-4     Document Type: Article
Times cited : (31)

References (17)
  • 1
    • 0001785160 scopus 로고
    • Reliability and reproducibility of ceramic sensors: Part I. NTC thermistors
    • Fagan J.G., Amarakoon V.R.W. Reliability and reproducibility of ceramic sensors: Part I. NTC thermistors. Am. Ceram. Soc. Bull. 72(1):1993;70-79.
    • (1993) Am. Ceram. Soc. Bull. , vol.72 , Issue.1 , pp. 70-79
    • Fagan, J.G.1    Amarakoon, V.R.W.2
  • 2
    • 0342393933 scopus 로고
    • Unicrystalline silicon carbide thermistor
    • Batha H.D., Carroll P.E. Unicrystalline silicon carbide thermistor. IRE Trans. Comp. Parts. 11:1964;129-134.
    • (1964) IRE Trans. Comp. Parts , vol.11 , pp. 129-134
    • Batha, H.D.1    Carroll, P.E.2
  • 3
    • 0018512002 scopus 로고
    • Highly reliable temperature sensor using RF-sputtered SiC thin film
    • Wasa K., Tohda T., Kasahara Y., Hayakawa S. Highly reliable temperature sensor using RF-sputtered SiC thin film. Rev. Sci. Instrum. 50:1979;1084-1088.
    • (1979) Rev. Sci. Instrum. , vol.50 , pp. 1084-1088
    • Wasa, K.1    Tohda, T.2    Kasahara, Y.3    Hayakawa, S.4
  • 8
    • 0342828672 scopus 로고    scopus 로고
    • Electrical conductivity of aluminum added SiC ceramic and its application to thermistor
    • Terashige T., Okano K. Electrical conductivity of aluminum added SiC ceramic and its application to thermistor. Trans. Inst. Elect. Eng. Jpn. 118-A:1998;402-407.
    • (1998) Trans. Inst. Elect. Eng. Jpn. , vol.118 , pp. 402-407
    • Terashige, T.1    Okano, K.2
  • 9
    • 0024622683 scopus 로고
    • The development of a thin-film silicon carbide thermistor array for determining temperature profiles in an evaporating liquid film
    • Kiewra E.W., Wayner P.C. Jr. The development of a thin-film silicon carbide thermistor array for determining temperature profiles in an evaporating liquid film. J. Electrochem. Soc. 136:1989;740-744.
    • (1989) J. Electrochem. Soc. , vol.136 , pp. 740-744
    • Kiewra, E.W.1    Wayner P.C., Jr.2
  • 11
    • 0032155720 scopus 로고    scopus 로고
    • Potential of high-purity polycrystalline silicon carbide for thermistor applications
    • de Vasconcelos E.A., Zhang W.Y., Uchida H., Katsube T. Potential of high-purity polycrystalline silicon carbide for thermistor applications. Jpn. J. Appl. Phys. 37(9A):1998;5078-5079.
    • (1998) Jpn. J. Appl. Phys. , vol.37 , Issue.9 A , pp. 5078-5079
    • De Vasconcelos, E.A.1    Zhang, W.Y.2    Uchida, H.3    Katsube, T.4
  • 14
    • 0033098346 scopus 로고    scopus 로고
    • Influence of microstructural variation on the electrical properties of SiC microthermistors
    • Terashige T., Okano K. Influence of microstructural variation on the electrical properties of SiC microthermistors. IEEE Trans. Electron Devices. 46:1999;555-560.
    • (1999) IEEE Trans. Electron Devices , vol.46 , pp. 555-560
    • Terashige, T.1    Okano, K.2
  • 15
    • 0031144633 scopus 로고    scopus 로고
    • Negative temperature coefficient thermistors: Part V. The resistance measuring device and thermistor test methods
    • Lavenuta G. Negative temperature coefficient thermistors: Part V. The resistance measuring device and thermistor test methods. Sensors. 14(9):1997;48.
    • (1997) Sensors , vol.14 , Issue.9 , pp. 48
    • Lavenuta, G.1
  • 17
    • 0343699159 scopus 로고
    • Electrical conduction in thin metallic, dielectric and metallic-dielectric films
    • Campbell D.S., Morley A.R. Electrical conduction in thin metallic, dielectric and metallic-dielectric films. Rep. Prog. Phys. 34:1971;283-368.
    • (1971) Rep. Prog. Phys. , vol.34 , pp. 283-368
    • Campbell, D.S.1    Morley, A.R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.