Model of morphology evolution in the growth of polycrystalline β-SiC films

Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 439-445

  Yun, Jungheum ^a   Dandy, David S ^a  

^a Engineering Research Center and Hydraulics Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; CRYSTAL ORIENTATION; GRAIN SIZE AND SHAPE; MATHEMATICAL MODELS; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DEVICES; SILICON CARBIDE; SURFACE ROUGHNESS; TEXTURES;

POLYCRYSTALLINE FILMS;

SEMICONDUCTING FILMS;

EID: 0033738704     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00243-0     Document Type: Article

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