Preparation and pyroelectric characteristics of Pb(Zr, Ti)O3 thin films grown by metalorganic chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 9 SUPPL. B, 1996, Pages 4886-4889

  Asakura, Takao ^a   Ishikawa, Koji ^a   Sato, Atushi ^a   Okada, Masaru ^a  

^a CHUBU UNIVERSITY   (Japan)

Author keywords

Crystalline orientation; MOCVD; Pyroelectrics; PZT

Indexed keywords

CRYSTALLINE ORIENTATION; METALLORGANIC PRECURSORS;

EXPERIMENTS; LEAD ALLOYS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PYROELECTRICITY; TITANIUM; ZIRCONIUM;

THIN FILMS;

EID: 0030231617     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.4886     Document Type: Article

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