SCOPUS 정보 검색 플랫폼

Microelectronics Reliability

Volumn 40, Issue 4-5, 2000, Pages 807-810

Synthesis and characterisation of metal suboxides for gas sensors

(8) Calderer, J a Molinas P a Sueiras, J b Llobet, E b Vilanova, X b Correig, X b Masana, F a Rodriguez A a

a UNIVERSITAT POLITÈCNICA DE CATALUNYA (Spain)

b UNIVERSITAT ROVIRA I VIRGILI (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; MAGNETRON SPUTTERING; SEMICONDUCTING TIN COMPOUNDS; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

REACTIVE MAGNETRON SPUTTERING; TIN MONOXIDE;

SEMICONDUCTING FILMS;

EID: 0033732531 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/S0026-2714(99)00306-6 Document Type: Article

Times cited : (36)

References (8)

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