Amorphous carbon nitride films irradiated with argon ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 166, Issue , 2000, Pages 420-425

  Wang, Jianjun ^a   Rangel, Elidiane C ^a   Da Cruz, Nilson C ^a   Swart, Jacobus W ^a   De Moraes, Mario A B ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ARGON; CHEMICAL BONDS; CRYSTAL ATOMIC STRUCTURE; DEPOSITION; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRONIC STRUCTURE; ENERGY GAP; ION IMPLANTATION; MOLECULAR STRUCTURE; NITRIDES; RADIATION EFFECTS;

CARBON NITRIDE; OPTICAL GAP; TWO-POINT PROBE;

AMORPHOUS FILMS;

EID: 0033728681     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)01054-X     Document Type: Article

References (16)

1. Davenas J. Appl. Surf. Sci. 43:1989;218.
2. Kaplan M.L., Forrest S.R., Schmidt P.H., Venkatesan T. J. Appl. Phys. 55:1984;732.
3. Lee E.H., Rao G.R., Lewis M.B., Mansur L.K. J. Mater. Res. 9:1994;1043.
4. E.H. Lee, in: M.K. Ghosh, K.L. Mittal (Eds.), Polyimides: Fundamental Aspects and Applications, Marcel Dekker, New York, 1996 (Chapter 17).
5. Yasuda H. Plasma Polymerization. 1985;Academic Press, New York.
6. E.C. Rangel, PhD thesis, Instituto de Física, Universidade Estadual de Campinas, 1999.
7. Rangel E.C., Cruz N.C., de Moraes M.A.B. Nucl. Instr. and Meth. B. 141:1998;211.
8. Durrant S.F., Marçal N., Castro S.G., Vinhas R.C., de Moraes M.A.B., Nicola J.H. Thin Solid Films. 259:1995;139.
9. Durrant S.F., Mota R.P., de Moraes M.A.B. J. Appl. Phys. 71:1992;448.
10. Doolitle R.L. Nucl. Instr. and Meth. B. 15:1986;227.
11. Lewis M.B., Lee E.H. Nucl. Instr. and Meth. B. 61:1991;457.
12. Davenas J., Ku X.L., Boiteux G., Sage D. Nucl. Instr. and Meth. B. 39:1989;754.
13. Marletta G. Nucl. Instr. and Meth. B. 46:1990;295.
14. Tauc J., Grigorovici R., Vancu A. Phys. Status Solidi. 15:1966;627.
15. Prawer S., Kalish R., Adel M., Richter V. J. Appl. Phys. 61:1987;4492.
16. Adel M.E., Kalish R., Prawer S. J. Appl. Phys. 62:1987;4096.