Influence of nitrogen implantation on the properties of polymer films deposited in benzene glow discharges

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 141, Issue 1-4, 1998, Pages 211-215

  Rangel, Elidiane C ^a   Da Cruz, Nilson C ^a   Bica De Moraes, Mário A ^a   Kretly, Luiz C ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Chemical structure; Ion implantation; Optical absorption; Plasma polymer; Resistivity

Indexed keywords

BENZENE; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRONIC STRUCTURE; INFRARED SPECTROSCOPY; ION IMPLANTATION; MOLECULAR STRUCTURE; PLASMA ETCHING; POLYMERIZATION; ULTRAVIOLET SPECTROSCOPY;

TWO POINT PROBE TECHNIQUE;

PLASTIC FILMS;

EID: 0032068196     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00068-8     Document Type: Article

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