Computer simulation of thermal-mechanical effects of high intensity pulsed ion beams on a metal surface

Surface and Coatings Technology

Volumn 128-129, Issue 1, 2000, Pages 381-386

  Xiaoyun, Le ^a   Sha, Yan ^a   Weijiang, Zhao ^a   Baoxi, Han ^a   Yugang, Wang ^a   Jianming, Xue ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Computer simulation; IPIBs; Thermal mechanical effects

Indexed keywords

COMPUTER SIMULATION; CURRENT DENSITY; ION BEAM LITHOGRAPHY; ION BEAMS; ION IMPLANTATION; MONTE CARLO METHODS; SAMPLING;

ENERGY DEPOSITION; FLUID-PLASTIC EQUATIONS; PULSED ION BEAMS; THERMA-MECHANICAL EFFECTS;

SURFACE STRUCTURE;

EID: 0033726331     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00611-3     Document Type: Article

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