High-power ion beam sources for industrial application

Surface and Coatings Technology

Volumn 96, Issue 1, 1997, Pages 103-109

  Remnev, G E ^a   Isakov, I F ^a   Opekounov, M S ^a   Kotlyarevsky, G I ^a   Kutuzov, V L ^b   Lopatin, V S ^a   Matvienko, V M ^a   Ovsyannikov, M Yu ^b   Potyomkin, A V ^a   Tarbokov, V A ^a  

^a Nuclear Physics Institute   (Russian Federation)

^b Linetron Sci Industrial Enterprise   (Russian Federation)

Author keywords

High power ion beams; Short pulse ion implantation; Surface modification

Indexed keywords

CURRENT DENSITY; ION BEAMS; ION IMPLANTATION; IONS; SURFACE TREATMENT;

HIGH POWER ION BEAM; ION FLUX ENERGY; SHORT PULSE ION IMPLANTATION;

ION SOURCES;

EID: 0031551650     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00116-3     Document Type: Article

References (13)

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