Surface leakage current analysis of ion implanted ZnS-passivated n-on-p HgCdTe diodes in weak inversion

Journal of Electronic Materials

Volumn 29, Issue 6, 2000, Pages 832-836

  Kim, Young Ho ^a,b   Bae, Soo Ho ^a   Lee, Hee Chul ^a   Kim, Choong Ki ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b KEC Research Institute of Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CHARGE; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; ION IMPLANTATION; LEAKAGE CURRENTS; MERCURY COMPOUNDS; PASSIVATION; SEMICONDUCTOR DIODES; ZINC SULFIDE;

GATE CONTROLLED DIODES; MERCURY CADMIUM TELLURIDE;

SEMICONDUCTING CADMIUM TELLURIDE;

EID: 0033721521     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-000-0233-y     Document Type: Article

References (15)

1. V. Gopal and V. Dhar, IEEE Trans. Electron Devices 33, 1489 (1986).
2. R.K. Willardson and A.C. Beer, editors, Semiconductors and Semimetals, 18, 207 (1981).
3. Y. Nemirovski, D. Rosenfeld, R. Adar, and A. Kornfeld, J. Vac. Sci. Technol. A 7, 528 (1989).
4. R.K. Bhan and Vishnu Gopal, Semicond. Sci. Technol. 9, 289 (1994).
5. J.A. Wilson, V.A. Cotton, J. Silberman, D. Laser, W.E. Spicer, and P. Morgan, J. Vac. Sci. Technol. A1, 1719 (1983).
6. B.K. Janousek, R.C. Carscallen, and P.A. Bertrand, J. Vac. Sci. Technol. A1, 1723 (1983).
7. J.A. Wilson and V.A. Cotton, J. Vac. Sci. Technol. A 3, 199 (1985).
8. N. Kajihara, G. Sudo, Y. Miyamoto, and K. Tanokawa, J. Electrochem. Soc. 135, 1252 (1988).
9. Y. Nemirovsky, J. Vac. Sci. Technol. A8, 1185 (1990).
10. Y. Nemirovsky and G. Bahir, J. Vac. Sci. Technol. A7, 450 (1989).
11. S.H. Lee, S.H. Bae, H.C. Lee, and C.K. Kim, J. Electron. Mater. 27, 6 (1998).
12. S. Wolf, Silicon Processing, vol. 3 (Lattice Press, 1995), p. 112.
13. L.F. Lou and W.H. Frye, J. Appl. Phys. 56, 2253 (1984).
14. M.H. Weiler and G.J. Tarnowski, J. Electron. Mater. 26, 635 (1997).
15. V. Ariel, V. Garber, D. Rosenfeld, and G. Bahir, J. Electron. Mater 24, 1169 (1995).