Low-cost piezoresistive silicon load cell independent of force distribution

Journal of Micromechanics and Microengineering

Volumn 10, Issue 2, 2000, Pages 200-203

  Zwijze, Robert A F ^a   Wiegerink, Remco J ^a   Krijnen, Gijs J M ^a   Lammerink, Theo S J ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CREEP; RESISTORS; STRAIN GAGES; STRESSES;

SILICON LOAD CELL; TEMPERATURE COMPENSATION; ZERO LOAD RESISTOR;

SEMICONDUCTING SILICON;

EID: 0033721214     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/2/317     Document Type: Article

References (10)

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