Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 558-563

  Wiegerink, Remco ^a   Zwijze, Robert ^a   Krijnen, Gijs ^a   Lammerink, Theo ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; SILICON SENSORS;

MICROMACHINED SILICON LOAD CELLS;

MICROSENSORS;

EID: 0032638820     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746889     Document Type: Conference Paper

References (4)