The failure mechanisms and phase formation for Ni, Co and Cu contacts on ion implanted (0 0 1)Si under high current stress

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 169, Issue 1-4, 2000, Pages 161-165

  Lin, H H ^a   Cheng, S L ^a   Chen, L J ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033717476     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00033-1     Document Type: Article

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