Metal organic chemical vapor deposition of Co-, Mn-, Co-Zr and Mn-Zr oxide thin films

Materials Research Society Symposium - Proceedings

Volumn 606, Issue , 2000, Pages 69-74

  Barreca, D ^a   Benetollo, F ^b   Bozza, M ^b   Bozza, S ^b   Carta, G ^b   Cavinato, G ^a   Rossetto, G ^b   Zanella, P ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT COMPOUNDS; MANGANESE COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; VAPORS; WATER; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIA;

COBALT OXIDE; MANGANESE OXIDE; PRECURSORS; REACTOR CHAMBER; WATER VAPOR;

THIN FILMS;

EID: 0033709956     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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