Use of artificial neural networks to predict thickness and optical constants of thin films from reflectance data

Thin Solid Films

Volumn 370, Issue 1, 2000, Pages 122-127

  Tabet, Milad F ^a   McGahan, William A ^a  

^a NANOMETRICS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; MATHEMATICAL MODELS; NEURAL NETWORKS; REFRACTIVE INDEX; SEMICONDUCTING SILICON; SPECTROSCOPY; THICKNESS MEASUREMENT;

ALLOY INTERPOLATION MODEL; CAUCHY DISPERSION MODEL; LEVENBERG-MARQUARDT ALGORITHM; OPTICAL CONSTANTS; POLYSILICON;

THIN FILMS;

EID: 0033703167     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00952-4     Document Type: Article

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