Thermodynamics analyses of the effect of CH3 and C2H2 on morphology of CVD diamond films

Thin Solid Films

Volumn 368, Issue 2, 2000, Pages 266-268

  Zhang, Jian Yun ^a   Wang, Peng Fei ^a   Ding, Shi Jin ^a   Wei Zhang, David ^a   Wang, Ji Tao ^a   Liu, Zhi Jie ^b  

^a FUDAN UNIVERSITY   (China)

^b BIELEFELD UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; FILM GROWTH; HYDROCARBONS; MATHEMATICAL MODELS; MORPHOLOGY; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THERMODYNAMICS;

DIAMOND FACET GROWTH; NONEQUILIBRIUM THERMODYNAMIC COUPLING MODEL;

DIAMOND FILMS;

EID: 0033690494     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00779-3     Document Type: Article

References (14)

1. Harris S.J., Belton D.N. Thin Solid Films. 212:1992;193.
2. Harris S.J., Martin L.R. J. Mater. Res. 5:1990;2313.
3. Frenklach M., Wang H. Phys. Rev. B. 43:1991;1520.
4. Sun Biwu, Zhang Xiaopin, Lin Zhangda. Phys. Rev. B. 47:1993;9816.
5. Hsu W.L. Appl. Phys. Lett. 59:1991;1427.
6. Liu Z.J., Zhang D.W., Zhang J.Y., Wan Y.Z., Wang J.T. Thin Solid Films. 342:1999;42.
7. Zhang D.W., Wan Y.Z., Liu Z.J., Wang J.T. J. Mater. Sci. Lett. 16:1997;1349.
8. Wang J.T., Wan Y.Z., Liu Z.J., Zhang D.W. Mater. Lett. 33:1998;311.
9. Wang J.T., Wan Y.Z., Zhang D.W., Liu Z.J., Huang Z.Q. J. Mater. Res. 12:1997;3250.
10. Zhang D.W., Liu Z.J., Wan Y.Z., et al. Phys. A. 66:1998;49.
11. Liu Z.J., Zhang D.W., Wan Y.Z., et al. Phys. A. 68:1999;359.
12. Matsumoto S., Sato Y., Tsutsumi M. J. Mater. Sci. 17:1982;3106.
13. Kobashi K., Nishimura K., Kawate Y., et al. Phys. Rev. B. 38:1988;4067.
14. Sato Y., Kamo M. Surf. Coat. Technol. 39/40:1989;183.