Density and SP3 content in diamond-like carbon films by X-ray reflectivity and electron energy loss spectroscopy

Materials Research Society Symposium - Proceedings

Volumn 593, Issue , 2000, Pages 293-298

  Libassi, A ^a   Ferrari, A C ^b   Stolojan, V ^c   Tanner, B K ^a   Robertson, J ^b   Brown, L M ^c  

^a DURHAM UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; DENSITY MEASUREMENT (SPECIFIC GRAVITY); DEPOSITION; ELECTROMAGNETIC WAVE REFLECTION; ELECTRON CYCLOTRON RESONANCE; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; GASES; HYDROGENATION; INTERFACES (MATERIALS); SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

AMORPHOUS CARBON; DIAMOND LIKE CARBON FILMS; INTERNAL LAYERING; X RAY REFLECTIVITY;

DIAMOND FILMS;

EID: 0033685302     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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