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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 1, 2000, Pages 401-404

Comparison of contact radius models for ultrashallow spreading resistance profiles

(4) Hartford, E J a Ramey, S M a Ye, C W a Hartford, C L a

a Solid State Measurements Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC RESISTANCE MEASUREMENT; MATHEMATICAL MODELS; MULTILAYERS; SEMICONDUCTING FILMS; SEMICONDUCTOR JUNCTIONS;

SHEET RESISTANCE PROFILES (SRP); SPREADING RESISTANCE PROBES (SRP); VARIABLE PROBE SPACING (VPS) TECHNIQUES;

SEMICONDUCTING BORON;

EID: 0033683707 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.591203 Document Type: Article

Times cited : (4)

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