Diagnoses of inductively coupled SF6 and N2 plasmas at atmospheric pressure

Thin Solid Films

Volumn 345, Issue 1, 1999, Pages 134-139

  Paul, K C ^a   Hatazawa, S ^a   Takahashi, M ^a   Cliteur, G J ^b   Sakuta, T ^a  

^a KANAZAWA UNIVERSITY   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; ATOMS; CARRIER CONCENTRATION; ELECTRON ABSORPTION; FLOW OF FLUIDS; INCLUSIONS; IONIZATION; MATHEMATICAL MODELS; NITROGEN; SULFUR COMPOUNDS;

FLOW RATE; MIXED GAS PLASMA; SHEATH CHANNEL; STARK BROADENING METHOD;

PLASMAS;

EID: 0033531809     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00103-0     Document Type: Article

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