Wavelength-dependent diffusion conditions of nickel-indiffused LiNbO3 optical waveguides

Microwave and Optical Technology Letters

Volumn 22, Issue 5, 1999, Pages 358-361

  Chang, Wen Ching ^a   Sue, Chao Yung ^a   Hou, Hung Ching ^a   Hsuan, Ming Yung ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ELECTRONIC EQUIPMENT MANUFACTURE; HIGH TEMPERATURE EFFECTS; INTEGRATED OPTICS; LIGHT MODULATORS; LITHIUM NIOBATE; NICKEL; OPTICAL BEAM SPLITTERS;

MACH-ZEHNDER MODULATORS; NICKEL INDIFFUSED LITHIUM NIOBATE OPTICAL WAVEGUIDES;

OPTICAL WAVEGUIDES;

EID: 0033527101     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1098-2760(19990905)22:5<358::AID-MOP19>3.0.CO;2-J     Document Type: Article

References (16)

1. E. Voges and A. Neyer, Integrated-optic devices on LiNbO3 for optical communication, J Lightwave Technol LT-5 (1987), 1229-1236.
2. R.C. Alferness, Waveguide electrooptical modulators, IEEE Trans Microwave Theory Tech MTT-30 (1982), 1121-1137.
3. W.K. Burns, P.H. Klein, and E.J. West, Ti diffusion in Ti: planar and channel optical waveguides, J Appl Phys 50 (1979), 6175-6182.
4. 3, optical waveguides by Zn diffusion from vapor phase, Appl Phys Lett 66 (1995), 1449-1451.
5. M.N. Armenise, Fabrication techniques of lithium niobate waveguides, Proc J Inst Elec Eng 22 (1988) 85-91.
6. 3, Appl Phys Lett 25 (1974), 458-460.
7. G.J. Griffiths and R.J. Esdaile, Analysis of titanium diffused planar optical waveguide in lithium niobate, IEEE J Quantum Electron QE-20 (1984), 149-159.
8. 3 optical waveguides, Appl Phys Lett 30 (1977), 376-379.
9. 3 optical waveguides, Appl Phys Lett 31 (1977), 742-744.
10. P.K. Wei and W.S. Wang, Fabrication of lithium niobate optical channel waveguides by nickel indiffusion, Microwave Opt Technol Lett 7 (1994), 219-221.
11. Y.P. Liao, D.J. Chen, R.C. Lu, and W.S. Wang, Nickel-diffused lithium niobate optical waveguide with process-dependent polarization, IEEE Photon Technol Lett 8 (1996), 548-550.
12. 3 polarization splitter at 1.3 μm wavelength, Electron Lett 32 (1996), 1003-1005, 1996.
13. R.S. Cheng, W.L. Cheng, and W.S. Wang, Mach-Zehnder modulators with lithium niobate ridge waveguides by proton-exchanged wet-etch and nickel indiffusion, IEEE Photon Technol Lett 7 (1995), 1282-1284.
14. 3 Mach-Zehnder modulators with a combinational-type waveguide structure, Microwave Opt Technol Lett 20 (1999).
15. 3 directional coupler, Microwave and Optical Technology Letters 19 (1998), 24-27.
16. W.-C. Chang, C.-Y. Sue, H.-C. Hou, S.-J. Chang, and P.-K. Wei, A novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides, J Lightwave Technol (Apr. 1999).