메뉴 건너뛰기




Volumn 17, Issue 4, 1999, Pages 613-620

Novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; ELECTRIC POTENTIAL; ELECTROOPTICAL EFFECTS; ETCHING; INTEGRATED OPTICS; LIGHT EXTINCTION; LIGHT MODULATION; LITHIUM NIOBATE; MULTILAYERS; NICKEL; SILICON; TITANIUM;

EID: 0032648056     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.754791     Document Type: Article
Times cited : (6)

References (18)
  • 1
    • 0026909943 scopus 로고
    • 3 optical modulator with modulation bandwidth more than 150 GHz
    • 3 optical modulator with modulation bandwidth more than 150 GHz," Electron. Lett., vol. 28, no. 18, pp. 1759-1761, 1992.
    • (1992) Electron. Lett. , vol.28 , Issue.18 , pp. 1759-1761
    • Noguchi, K.1    Kawano, K.2
  • 3
    • 0026875744 scopus 로고
    • 3 modulator with multimode active section
    • 3 modulator with multimode active section," Electron. Lett., vol. 28, pp. 1197-1198, 1992.
    • (1992) Electron. Lett. , vol.28 , pp. 1197-1198
    • Dolfi, D.W.1    Ranganth, T.R.2
  • 4
    • 0024733268 scopus 로고
    • New travelling-wave electrode Mach-Zehnder optical modulator with 20GHz bandwidth and 4.7 V driving voltage at 1.52 μm wavelength
    • K. Kawano, T. Kitoh, H. Jumonji, T. Nozawa, and M. Yanagibashi, "New travelling-wave electrode Mach-Zehnder optical modulator with 20GHz bandwidth and 4.7 V driving voltage at 1.52 μm wavelength," Electron. Lett., vol. 25, no. 20, pp. 1382-1383, 1989.
    • (1989) Electron. Lett. , vol.25 , Issue.20 , pp. 1382-1383
    • Kawano, K.1    Kitoh, T.2    Jumonji, H.3    Nozawa, T.4    Yanagibashi, M.5
  • 5
    • 0026139044 scopus 로고
    • 3 optical intensity modulator with more than 20 GHz bandwidth and 5.2 V driving voltage
    • 3 optical intensity modulator with more than 20 GHz bandwidth and 5.2 V driving voltage," IEEE Photon. Technol. Lett., vol. 3, pp. 333-335, 1991.
    • (1991) IEEE Photon. Technol. Lett. , vol.3 , pp. 333-335
    • Noguchi, K.1    Kawano, K.2    Nozawa, T.3    Suzuki, T.4
  • 10
    • 0026946989 scopus 로고
    • Wet etching of proton-exchanged lithium niobateA novel processing technique
    • Nov.
    • F. Laurell, J. Webjorn, G. Arvidsson, and J. Holmberg, "Wet etching of proton-exchanged lithium niobateA novel processing technique," J. Lightwave Technol., vol. 10, pp. 1606-1609, Nov. 1992.
    • (1992) J. Lightwave Technol. , vol.10 , pp. 1606-1609
    • Laurell, F.1    Webjorn, J.2    Arvidsson, G.3    Holmberg, J.4
  • 11
    • 0029256083 scopus 로고
    • Lithium niobate ridge waveguides fabricated by wet etching
    • H. J. Lee and S. Y. Shin, "Lithium niobate ridge waveguides fabricated by wet etching," Electron. Lett., vol. 31, no. 4, pp. 268-269, 1995.
    • (1995) Electron. Lett. , vol.31 , Issue.4 , pp. 268-269
    • Lee, H.J.1    Shin, S.Y.2
  • 12
    • 0029404048 scopus 로고
    • Mach-Zehnder modulators with lithium niobate ridge waveguides fabricated by proton-exchange wet etch and nickel indiffusion
    • July
    • R. S. Cheng, W. L. Cheng, and W. S. Wang, "Mach-Zehnder modulators with lithium niobate ridge waveguides fabricated by proton-exchange wet etch and nickel indiffusion," IEEE Photon. Technol. Lett., vol. 7, pp. 1282-1284, July 1995.
    • (1995) IEEE Photon. Technol. Lett. , vol.7 , pp. 1282-1284
    • Cheng, R.S.1    Cheng, W.L.2    Wang, W.S.3
  • 13
    • 0031257150 scopus 로고    scopus 로고
    • Wet-etched ridge waveguides in Y-cut lithium niobate
    • Oct.
    • R. S. Cheng, T. J. Wang, and W. S. Wang, "Wet-etched ridge waveguides in Y-cut lithium niobate," J. Lightwave Technol., vol. 15, pp. 1880-1887, Oct. 1997.
    • (1997) J. Lightwave Technol. , vol.15 , pp. 1880-1887
    • Cheng, R.S.1    Wang, T.J.2    Wang, W.S.3
  • 15
    • 0029405075 scopus 로고
    • Lithium niobate ridge waveguides by nickel diffusion and proton-exchanged wet-etching
    • Nov.
    • W. L. Chen, R. S. Cheng, J. H. Lee, and W. S. Wang, "Lithium niobate ridge waveguides by nickel diffusion and proton-exchanged wet-etching," IEEE Photon. Technol. Lett., vol. 7, pp. 1318-1320, Nov. 1995.
    • (1995) IEEE Photon. Technol. Lett. , vol.7 , pp. 1318-1320
    • Chen, W.L.1    Cheng, R.S.2    Lee, J.H.3    Wang, W.S.4
  • 16
    • 0032121565 scopus 로고    scopus 로고
    • Characteristics of proton-exchanged wet etching on Z-cut nickel-indiffused lithium niobate
    • July
    • W. C. Chang, S. J. Chang, C. Y. Sue, and J. L. Shu, "Characteristics of proton-exchanged wet etching on Z-cut nickel-indiffused lithium niobate," Microwave and Opt. Technol. Lett., July 1998.
    • (1998) Microwave and Opt. Technol. Lett.
    • Chang, W.C.1    Chang, S.J.2    Sue, C.Y.3    Shu, J.L.4
  • 17
    • 0030129106 scopus 로고    scopus 로고
    • Nickel-diffused lithium niobate optical waveguide with process-dependent polarization
    • Apr.
    • Y. P. Liao, D. J. Chen, R. C. Lu, and W. S. Wang, "Nickel-diffused lithium niobate optical waveguide with process-dependent polarization," IEEE Photon. Technol. Lett., vol. 8, pp. 548-550, Apr. 1996.
    • (1996) IEEE Photon. Technol. Lett. , vol.8 , pp. 548-550
    • Liao, Y.P.1    Chen, D.J.2    Lu, R.C.3    Wang, W.S.4
  • 18
    • 0028765026 scopus 로고
    • Fabrication of lithium niobate optical channel waveguides by nickel indiffusion
    • P. K. Wei and W. S. Wang, "Fabrication of lithium niobate optical channel waveguides by nickel indiffusion," Microwave Opt. Technol. Lett., vol. 7, no. 5, pp. 219-221, 1994.
    • (1994) Microwave Opt. Technol. Lett. , vol.7 , Issue.5 , pp. 219-221
    • Wei, P.K.1    Wang, W.S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.