Continuum treatment of spatial correlation in damage annealing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 153, Issue 1-4, 1999, Pages 172-176

  Hobler, G ^a   Pelaz, L ^a   Rafferty, C S ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; CONTINUUM MECHANICS; CORRELATION METHODS; DOSIMETRY; ION IMPLANTATION; MONTE CARLO METHODS; NUMERICAL METHODS; PROBABILITY; RADIATION DAMAGE;

COLLISION CASCADES; DIFFUSION LIMITED REACTIONS; DIFFUSION TYPE EQUATION; FRENKEL PAIRS; RECOIL CASCADE; RECOMBINATION RATE; SPATIAL CORRELATION;

DIFFUSION;

EID: 0033516092     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00045-2     Document Type: Article

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8. Jaraiz M.et al. 1998;Mat. Res. Soc. Meet. Abstract EE2.6, Spring.
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