Behavior of implanted nitrogen in Zr/carbon bilayer

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 863-867

  Miyagawa, Y ^a   Baba, K ^b   Hatada, R ^b   Nakao, S ^a   Ikeyama, M ^a   Miyagawa, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Technology Center of Nagasaki   (Japan)

Author keywords

Monte Carlo simulation; Nitrogen implantation; NRA; RBS; Zr C bilayer

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; BINARY ALLOYS; DIFFUSION IN SOLIDS; ION IMPLANTATION; MONTE CARLO METHODS; NITROGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

NUCLEAR RESONANCE ANALYSIS (NRA);

ZIRCONIUM ALLOYS;

EID: 0033513941     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00865-9     Document Type: Article

References (7)

1. A.Y. Liu, M.L. Cohen, Science 245 (1989) 841.
2. F. Link, H. Baumann, A. Markwitz, E.F. Krimmel, K. Bethge, Nucl. Instr. and Meth. B 113 (1996) 235.
3. Y. Miyagawa, M. Ikeyama, K. Saitoh, G. Massouras, S. Miyagawa, J. Appl. Phys. (1991) 7289.
4. S. Miyagawa, M. Ikeyama, K. Saitoh, S. Nakao, Y. Sakai, Y. Miyagawa, Nucl. Instr. and Meth. B 80/81 (1993) 480.
5. Y. Miyagawa, K. Saitoh, M. Ikeyama, S. Nakao, S. Miyagawa, Nucl. Instr. and Meth. B 118 (1996) 209.
6. E. Kotai, Nucl. Instr. and Meth. B 85 (1994) 588.
7. Y. Miyagawa, S. Nakao, K. Baba, M. Ikeyama, K. Saitoh, S. Miyagawa, Mat. Sci. and Eng. A., 1998, in print.