Conventional depth profiling using narrow nuclear resonances

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 209-213

  Miyagawa, Y ^a   Saitoh, K ^a   Ikeyama, M ^a   Nakao, S ^a   Miyagawa, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; COMPUTER SOFTWARE; ION BEAMS; ION IMPLANTATION; MONTE CARLO METHODS; NITROGEN; RESONANCE; SCANNING; TARGETS;

DEPTH PROFILING; ION BEAM ENERGY; NARROW NUCLEAR RESONANCES; TARGET HOLDER;

NUCLEAR PHYSICS;

EID: 0030565133     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01070-X     Document Type: Article

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