Edge supported amorphous silicon membranes for diffraction studies

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 360-365

  Roorda, Sjoerd ^a   Laaziri, Khalid ^a   Gujrathi, Subhash C ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Amorphous silicon; Ion implantation; Radial distribution function; X ray diffraction

Indexed keywords

AMORPHOUS FILMS; CHEMICAL ATTACK; ETCHING; HYDROGEN; IMPURITIES; ION IMPLANTATION; OXYGEN; POROUS MATERIALS; X RAY DIFFRACTION ANALYSIS;

ELASTIC RECOIL DETECTION; RADIAL DISTRIBUTION FUNCTION;

AMORPHOUS SILICON;

EID: 0033513939     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00670-3     Document Type: Article

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