Tribological properties of nitrogen implanted diamond-like carbon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 659-663

  Miyagawa, S ^a   Ikeyama, M ^a   Nakao, S ^a   Saitoh, K ^a   Miyagawa, Y ^a   Baba, K ^b   Hatada, R ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Technology Cent of Nagasaki   (Japan)

Author keywords

DLC; Ion implantation; Micro tribology; Nitrogen

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; DIFFUSION IN SOLIDS; ION IMPLANTATION; NITROGEN; PLASMA APPLICATIONS; TRIBOLOGY; WEAR OF MATERIALS;

ELASTIC RECOIL DETECTION ANALYSIS; NUCLEAR REACTION ANALYSIS;

DIAMOND FILMS;

EID: 0033513790     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00790-3     Document Type: Article

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