The formation of microvoids in MgO by helium ion implantation and thermal annealing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 768-772

  Van Veen, A ^a   Schut, H ^a   Fedorov, A V ^a   Labohm, F ^a   Neeft, E A C ^b   Konings, R J M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b TNO   (Netherlands)

Author keywords

Cavities; Doppler broadening; Ion implantation; MgO; Positron annihilation

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; CRYSTAL ORIENTATION; HELIUM; ION IMPLANTATION; SINGLE CRYSTALS;

MICROVOIDS; NEUTRON DEPTH PROFILING; POSITRON ANNIHILATION; POSITRON BEAM ANALYSIS;

MAGNESIA;

EID: 0033513756     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0168-583x(98)00853-2     Document Type: Article

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