Solution of the outgassing equation for the pump down of an unbaked vacuum system

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 229-234

  Akaishi, K ^a  

^a NATIONAL INSTITUTE FOR FUSION SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033484974     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581576     Document Type: Article

References (8)

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