Experimental study on the scaling law of the outgassing rate with a pumping parameter

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 2, 1997, Pages 258-264

  Akaishi, K ^a   Kubota, Y ^a   Motojima, O ^a   Nakasuga, M ^b   Funato, Y ^c   Mushiaki, M ^d  

^a NATIONAL INSTITUTE FOR FUSION SCIENCE   (Japan)

^b KYOTO UNIVERSITY   (Japan)

^c SUZUKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^d KAWASAKI MEDICAL SCHOOL   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031516620     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580522     Document Type: Article

References (10)

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