Ultraviolet-ozone jet cleaning process of organic surface contamination layers

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 150-154

  Moon, D W ^a   Kurokawa, A ^b   Ichimura, S ^b   Lee, H W ^c   Jeon, I C ^d  

^a Korea Research Institute of Standards and Science   (South Korea)

^b ELECTROTECHNICAL LABORATORY   (Japan)

^c Hanyang University   (South Korea)

^d Chonbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033483266     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581565     Document Type: Article

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