Abnormal steady states in reactive sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 70-76

  Zhu, Shenglong ^a   Wang, Fuhui ^a   Wu, Weitao ^b  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033482256     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581552     Document Type: Article

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