Thin film shear modulus determination with quartz crystal resonators

Sensors and Materials

Volumn 11, Issue 2, 1999, Pages 111-130

  Lucklum, Ralf ^a   Behling, Carsten ^a   Hauptmann, Peter ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Acoustic sensors; Materials science; Quartz crystal resonators; Shear modulus; Thin films

Indexed keywords

EID: 0033462710     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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