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Czechoslovak Journal of Physics

Volumn 49, Issue 3, 1999, Pages 359-372

Formation of Ti1-xSix and Ti1-xSixN films by magnetron co-sputtering

(3) Musil, J a,b Jankovcova H a Cibulka, V a

a UNIVERSITY OF WEST BOHEMIA (Czech Republic)

b INSTITUTE OF PHYSICS (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033424876 PISSN: 00114626 EISSN: None Source Type: Journal
DOI: 10.1023/A:1022853101763 Document Type: Article

Times cited : (16)

References (15)

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15
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.