Total reflection X-ray fluorescence analysis of light elements with synchrotron radiation and special X-ray tubes

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 52, Issue 7, 1997, Pages 861-872

  Streli, Christina ^a   Wobrauschek, P ^a   Bauer, V ^a   Kregsamer, P ^a   Gorgl R ^a   Pianetta, P ^b   Ryon, R ^c   Pahlke, S ^d   Fabry, L ^d  

^a TU WIEN   (Austria)

^b SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^d SILTRONIC AG   (Germany)

Author keywords

Energy dispersive X ray fluorescence analysis; Light elements; Synchrotron radiation; Total reflection X ray fluorescence analysis

Indexed keywords

ALUMINUM; ANODES; CARBON; FLUORESCENCE; MOLYBDENUM; OXYGEN; PHOTONS; SILICON WAFERS; SYNCHROTRON RADIATION; X RAY ANALYSIS; X RAY TUBES;

ENERGY DISPERSIVE X RAY FLUORESCENCE ANALYSIS; TOTAL REFLECTION X RAY FLUORESCENCE ANALYSIS;

TRACE ELEMENTS;

EID: 0031165143     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(96)01663-1     Document Type: Article

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