SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 652-657

An investigation of the properties of Ti-C:H films

(3) LoBiondo, Nicholas E a Aharonov, Robert R a Fontana, Raymond P a

a Multi Arc Inc (United States)

Author keywords

Acetylene flow; Bias voltage; Deposition parameters; Ti C:H films

Indexed keywords

ACETYLENE; CERAMIC COATINGS; DEPOSITION; ELASTIC MODULI; ELECTRIC CONDUCTIVITY OF SOLIDS; HARDNESS; MULTILAYERS; PERMITTIVITY; TITANIUM CARBIDE; TITANIUM NITRIDE;

BIAS VOLTAGE; VICKERS HARDNESS;

AMORPHOUS FILMS;

EID: 17044451237 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00517-3 Document Type: Article

Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.