Some new aspects in X-ray stress analysis of thin layers

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 404-409

  Genzel, Ch ^a   Reimers, W ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Residual stress gradients; Texture; Thin hard coatings; X ray stress analysis

Indexed keywords

HARDNESS; LATTICE CONSTANTS; RESIDUAL STRESSES; STRESS ANALYSIS; TEXTURES; THIN FILMS; TITANIUM COMPOUNDS; VAPOR DEPOSITION; X RAY CRYSTALLOGRAPHY;

PHYSICAL VAPOR DEPOSITION (PVD); THIN HARD COATINGS; TITANIUM CHROMIUM NITRIDE;

PROTECTIVE COATINGS;

CERAMIC COATING; RESIDUAL STRESS; TEXTURE;

EID: 0033383161     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00235-2     Document Type: Conference Paper

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