A fuzzy set approach for yield learning modeling in wafer manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 12, Issue 2, 1999, Pages 252-258

  Chen, Toly ^a,b   Wang, Mao Jiun J ^b  

^a VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Correction function; Learning; Linguistic variable; Semiconductor; Yield

Indexed keywords

COMPUTATIONAL LINGUISTICS; FUZZY SETS; LEARNING SYSTEMS; MATHEMATICAL MODELS; SILICON WAFERS; YIELD STRESS;

CORRECTION FUNCTIONS; GRUBER GENERAL YIELD MODEL; LEARNING MODEL;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033360509     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.762883     Document Type: Article

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