Online monitoring of PVT SiC bulk crystal growth using digital x-ray imaging

Materials Research Society Symposium - Proceedings

Volumn 572, Issue , 1999, Pages 259-264

  Wellmann, P J ^a   Bickermann, M ^a   Grau, M ^a   Hofmann, D ^a   Straubinger, T L ^a   Winnacker, A ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTORS; DIGITAL INSTRUMENTS; GRAPHITIZATION; HIGH TEMPERATURE OPERATIONS; IMAGING TECHNIQUES; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; SINGLE CRYSTALS; X RAYS;

DIGITAL X RAY IMAGING DETECTOR; PHYSICAL VAPOR TRANSPORT;

CRYSTAL GROWTH;

EID: 0033357046     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-572-259     Document Type: Conference Paper

References (9)

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