Novel assessment of process control monitor in advanced semiconductor manufacturing: A complete set of addressable failure site test structures (AFS-TS)

1999 IEEE International Symposium on Semiconductor Manufacturing, ISSM 1999 - Conference Proceedings

Volumn , Issue , 1999, Pages 241-244

  Hsieh, Sunnys ^a   Lin, Sheng Che ^a   Lee, Ming Huei ^a   Wang, Jian Rong ^a   Lin, Chingfu ^a   Huang, Chia Wen ^a   Cheng, Jye Yen ^a   Yang, Yu Hao ^a   Doong, K Y Y ^a,b   Miyamoto, K ^c   Hsu, C C H ^b  

^a Worldwide Semicond Manuf Corp   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONCRETE BEAMS AND GIRDERS; DEFECTS; MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE; COMPUTER SIMULATION; CRYSTAL DEFECTS; FAILURE ANALYSIS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; SEMICONDUCTOR DEVICE TESTING;

ASSESSMENT OF PROCESS; BACK-END OF LINE PROCESS; DEFECT IDENTIFICATION; DESIGN AND SIMULATION; SEMICONDUCTOR MANUFACTURING; SIMULATION SYSTEMS; TEST STRUCTURE; YIELD ENHANCEMENT;

PROCESS CONTROL;

ADDRESSABLE FAILURE SITE TEST STRUCTURES (AFS-TS);

EID: 0033356448     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSM.1999.808781     Document Type: Conference Paper

References (10)

1. V. Eukaszck, K. G. Grambow, W. J, Tarbrough, IliKIZ Transactions on Semiconductor Manufacturing, pp, 18-27, Vol. 3, No. 1, 1990
2. Dave Wilson, Anthony .1. Walton, IKEEConference on Microelectronic Test Structures, vol. 7, pp. 160-163, March, 1994.
3. Mark T. Bohr, Yousscl'A. EE-Mansy, IEEE Trans, flection Devices, vol. 45, no, 3, pp. 620-625, June, 1998.
4. H Sayan, M liuchler, IEEE Conference on Microelectronic 'test Structures, vol, 3, pp. 87-92, March, 1990
5. C. I. M. avd dor Klauw, J. J. M. .looslcn, IEEE Transactions on Semiconductor Manufacturing, pp. 206-212, Vol. 4, No, 3, 1991
6. D, Ward, A.J. Walton, W.d. Gammie, R.J. I to!will, lElvli Conl'crencc on Microelectronic Test Structures, Vol. 5, pp. 129-132, March 1992
7. C. Iless., A Strole, 1EKE Transactions on Semiconductor Manufacturing, pp, 284-292, Vol, 7, No, 3,1994
8. C. Hess, E, II. Weiland, IEEE Transactions on Semiconductor Manufacturing, pp. 194-203, Vol. 11, No. 2, May, 1998
9. Kelvin V.Y. Doong, J.Y. Cheng, CharlesC.H. Hsu, VLSI-TSA, pp.219-222, June 1999
10. Kelvin Y.Y. Doong, J.Y. Cheng, Charles C.I I. Hsu, pending patent