Process engineering issues of CSD-based thin-film multi-level ceramic capacitors

Integrated Ferroelectrics

Volumn 26, Issue 1, 1999, Pages 163-186

  Watt, Michael M ^a  

^a Gennum Corporation   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC CAPACITORS; COST EFFECTIVENESS; DEPOSITION; FERROELECTRIC MATERIALS; PROCESS ENGINEERING; SEMICONDUCTOR DEVICE MANUFACTURE;

CHEMICAL SOLUTION DEPOSITION; THIN FILM MULTI LEVEL CERAMIC CAPACITORS;

THIN FILMS;

EID: 0033349796     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584589908215620     Document Type: Article

References (7)

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2. Y. Sakabe, 'Recent Development in Multilayer Ceramic Capacitor', (Invited talk, American Ceramic Society, May 1998).
3. M. Grossmann, R. Slowak, S. Hoffmann, H. John, and R. Waser, 'A Novel Integrated Thin Film Capacitor Realized by a Multi layer Ceramic-Electrode Sandwich Structure', Proceedings of the Electroceramics VI - ISAF IX - ECAPD IV Conference, August 24-27, 1998 Montreux, CH, Poster B-A3-P5-99, submitted to J. of European Ceramic Society.
4. M.M. Watt, P. Woo, T. Rywak, L. McNeil, A. Kassam, V. Joshi, J.D. Cushiaro, B.M. Melnick, 'Feasibility Demonstration of a Multi-level Thin Film BST Capacitor Technology', Proceedings of the Electroceramics VI - ISAF IX - ECAPD IV Conference, August 24-27, 1998 Montreux, CH, Paper A-R1-O1-4, submitted to ISAF.
5. Y. Sakabe, Y. Takeshima, and K. Tanaka, 'Multilayer Ceramic Capacitors with Thin (Ba,Sr)TiO3 Layers by MOCVD', submitted to J. of Electroceramics (1998).
6. M. Watt, US Patent 5,745,335 (1998).
7. Data sheet, PRIMAXX 2F Deposition System, Primaxx. Inc.. 2/99.